Integrated circuit package and method

ABSTRACT

In an embodiment, a device includes: an interposer; a first integrated circuit device bonded to the interposer with dielectric-to-dielectric bonds and with metal-to-metal bonds; a second integrated circuit device bonded to the interposer with dielectric-to-dielectric bonds and with metal-to-metal bonds; a buffer layer around the first integrated circuit device and the second integrated circuit device, the buffer layer including a stress reduction material having a first Young&#39;s modulus; and an encapsulant around the buffer layer, the first integrated circuit device, and the second integrated circuit device, the encapsulant including a molding material having a second Young&#39;s modulus, the first Young&#39;s modulus less than the second Young&#39;s modulus.

PRIORITY CLAIM AND CROSS-REFERENCE

This application is a continuation of U.S. patent application Ser. No.17/876,159, filed on Jul. 28, 2022, entitled “Integrated Circuit Packageand Method,” which is a continuation of U.S. patent application Ser. No.17/139,192 filed on Dec. 31, 2020, entitled “Integrated Circuit Packageand Method,” now U.S. Pat. No. 11,469,197, issued on Oct. 11, 2022,which claims the benefits of U.S. Provisional Application No.63/070,468, filed on Aug. 26, 2020, which applications are herebyincorporated herein by reference in their entirety.

BACKGROUND

Since the development of the integrated circuit (IC), the semiconductorindustry has experienced continued rapid growth due to continuousimprovements in the integration density of various electronic components(i.e., transistors, diodes, resistors, capacitors, etc.). For the mostpart, these improvements in integration density have come from repeatedreductions in minimum feature size, which allows more components to beintegrated into a given area.

These integration improvements are essentially two-dimensional (2D) innature, in that the area occupied by the integrated components isessentially on the surface of the semiconductor wafer. The increaseddensity and corresponding decrease in area of the integrated circuit hasgenerally surpassed the ability to bond an integrated circuit chipdirectly onto a substrate. Interposers have been used to redistributeball contact areas from that of the chip to a larger area of theinterposer. Further, interposers have allowed for a three-dimensionalpackage that includes multiple chips. Other packages have also beendeveloped to incorporate three-dimensional aspects.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIG. 1 is a cross-sectional view of an integrated circuit device.

FIGS. 2 through 9 are cross-sectional views of intermediate steps duringa process for forming integrated circuit packages, in accordance withsome embodiments.

FIG. 10 is a cross-sectional view of an integrated circuit package, inaccordance with some embodiments.

FIG. 11 is a cross-sectional view of an integrated circuit package, inaccordance with some embodiments.

FIG. 12 is a cross-sectional view of an integrated circuit package, inaccordance with some embodiments.

FIG. 13 is a cross-sectional view of an integrated circuit package, inaccordance with some embodiments.

FIG. 14 is a cross-sectional view of an integrated circuit package, inaccordance with some embodiments.

FIG. 15 is a cross-sectional view of an integrated circuit package, inaccordance with some embodiments.

FIGS. 16A through 16E are top-down views of integrated circuit packages,in accordance with various embodiments.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the invention. Specificexamples of components and arrangements are described below to simplifythe present disclosure. These are, of course, merely examples and arenot intended to be limiting. For example, the formation of a firstfeature over or on a second feature in the description that follows mayinclude embodiments in which the first and second features are formed indirect contact, and may also include embodiments in which additionalfeatures may be formed between the first and second features, such thatthe first and second features may not be in direct contact. In addition,the present disclosure may repeat reference numerals and/or letters inthe various examples. This repetition is for the purpose of simplicityand clarity and does not in itself dictate a relationship between thevarious embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

According to various embodiments, integrated circuit packages are formedby directly bonding integrated circuit devices to a wafer that containsanother device, such as an interposer. Stress buffer layers are formedaround the integrated circuit devices before the integrated circuitdevices are encapsulated. The stress buffer layers are formed of amaterial that helps protect the integrated circuit devices duringexpansion of the encapsulant at high temperatures. The yield andreliability of the integrated circuit packages may thus be improved.

FIG. 1 is a cross-sectional view of an integrated circuit device 50.Multiple integrated circuit devices 50 will be packaged in subsequentprocessing to form integrated circuit packages. Each integrated circuitdevice 50 may be a logic device (e.g., central processing unit (CPU),graphics processing unit (GPU), microcontroller, etc.), a memory device(e.g., dynamic random access memory (DRAM) die, static random accessmemory (SRAM) die, etc.), a power management device (e.g., powermanagement integrated circuit (PMIC) die), a radio frequency (RF)device, a sensor device, a micro-electro-mechanical-system (MEMS)device, a signal processing device (e.g., digital signal processing(DSP) die), a front-end device (e.g., analog front-end (AFE) dies), thelike, or combinations thereof (e.g., a system-on-a-chip (SoC) die). Theintegrated circuit device 50 may be formed in a wafer, which may includedifferent device regions that are singulated in subsequent steps to forma plurality of integrated circuit devices 50. The integrated circuitdevice 50 includes a semiconductor substrate 52, an interconnectstructure 54, die connectors 56, and a dielectric layer 58.

The semiconductor substrate 52 may be a substrate of silicon, doped orundoped, or an active layer of a semiconductor-on-insulator (SOI)substrate. The semiconductor substrate 52 may include othersemiconductor materials, such as germanium; a compound semiconductorincluding silicon carbide, gallium arsenide, gallium phosphide, indiumphosphide, indium arsenide, and/or indium antimonide; an alloysemiconductor including silicon-germanium, gallium arsenide phosphide,aluminum indium arsenide, aluminum gallium arsenide, gallium indiumarsenide, gallium indium phosphide, and/or gallium indium arsenidephosphide; or combinations thereof. Other substrates, such asmulti-layered or gradient substrates, may also be used. Thesemiconductor substrate 52 has an active surface (e.g., the surfacefacing upward) and an inactive surface (e.g., the surface facingdownward). Devices are at the active surface of the semiconductorsubstrate 52. The devices may be active devices (e.g., transistors,diodes, etc.), capacitors, resistors, etc. The inactive surface may befree from devices.

The interconnect structure 54 is over the active surface of thesemiconductor substrate 52, and is used to electrically connect thedevices of the semiconductor substrate 52 to form an integrated circuit.The interconnect structure 54 may include one or more dielectriclayer(s) and respective metallization pattern(s) in the dielectriclayer(s). Acceptable dielectric materials for the dielectric layersinclude oxides such as silicon oxide or aluminum oxide; nitrides such assilicon nitride; carbides such as silicon carbide; the like; orcombinations thereof such as silicon oxynitride, silicon oxycarbide,silicon carbonitride, silicon oxycarbonitride or the like. Otherdielectric materials may also be used, such as a polymer such aspolybenzoxazole (PBO), polyimide, a benzocyclobuten (BCB) based polymer,or the like. The metallization patterns may include conductive viasand/or conductive lines to interconnect the devices of the semiconductorsubstrate 52. The metallization patterns may be formed of a conductivematerial, such as a metal, such as copper, cobalt, aluminum, gold,combinations thereof, or the like. The interconnect structure 54 may beformed by a damascene process, such as a single damascene process, adual damascene process, or the like.

Die connectors 56 are at the front side 50F of the integrated circuitdevice 50. The die connectors 56 may be conductive pillars, pads, or thelike, to which external connections are made. The die connectors 56 arein and/or on the interconnect structure 54. For example, the dieconnectors 56 may be part of an upper metallization pattern of theinterconnect structure 54. The die connectors 56 can be formed of ametal, such as copper, aluminum, or the like, and can be formed by, forexample, plating, or the like.

Optionally, solder regions (e.g., solder balls or solder bumps) may bedisposed on the die connectors 56 during formation of the integratedcircuit device 50. The solder balls may be used to perform chip probe(CP) testing on the integrated circuit device 50. CP testing may beperformed on the integrated circuit device 50 to ascertain whether theintegrated circuit device 50 is a known good die (KGD). Thus, onlyintegrated circuit devices 50, which are KGDs, undergo subsequentprocessing and are packaged, and devices which fail the CP testing arenot packaged. After testing, the solder regions may be removed insubsequent processing steps.

A dielectric layer 58 is at the front side 50F of the integrated circuitdevice 50. The dielectric layer 58 is in and/or on the interconnectstructure 54. For example, the dielectric layer 58 may be an upperdielectric layer of the interconnect structure 54. The dielectric layer58 laterally encapsulates the die connectors 56. The dielectric layer 58may be an oxide, a nitride, a carbide, a polymer, the like, or acombination thereof. The dielectric layer 58 may be formed, for example,by spin coating, lamination, chemical vapor deposition (CVD), or thelike. Initially, the dielectric layer 58 may bury the die connectors 56,such that the top surface of the dielectric layer 58 is above the topsurfaces of the die connectors 56. The die connectors 56 are exposedthrough the dielectric layer 58 during formation of the integratedcircuit device 50. Exposing the die connectors 56 may remove any solderregions that may be present on the die connectors 56. A removal processcan be applied to the various layers to remove excess materials over thedie connectors 56. The removal process may be a planarization processsuch as a chemical mechanical polish (CMP), an etch-back, combinationsthereof, or the like. After planarization, top surfaces of the dieconnectors 56 and the dielectric layer 58 are coplanar (within processvariations) and are exposed at the front side 50F of the integratedcircuit device 50. As will be described in greater detail below, theplanarized front side 50F of the integrated circuit device will bebonded to another device, such as an interposer.

In some embodiments, the integrated circuit device 50 is a stackeddevice that includes multiple semiconductor substrates 52. For example,the integrated circuit device 50 may be a memory device that includesmultiple memory dies such as a hybrid memory cube (HMC) device, a highbandwidth memory (HBM) device, or the like. In such embodiments, theintegrated circuit device 50 includes multiple semiconductor substrates52 interconnected by through-substrate vias or through-silicon vias(TSVs). Each of the semiconductor substrates 52 may (or may not) have aseparate interconnect structure 54.

FIGS. 2 through 9 are cross-sectional views of intermediate steps duringa process for forming integrated circuit packages, in accordance withsome embodiments. In FIGS. 2 through 8 , integrated circuit packages 100are formed by bonding integrated circuit devices 50 to a wafer 70. In anembodiment, the integrated circuit packages 100 are chip-on-wafer (CoW)packages, although it should be appreciated that embodiments may beapplied to other three-dimensional integrated circuit (3DIC) packages.The wafer 70 has package regions 100A, 100B, which each include devicesformed therein, such as interposers. In FIG. 9 , the package regions100A, 100B are singulated to form integrated circuit packages 100 thateach include a singulated portion of the wafer 70 (e.g., an interposer140, see FIG. 9 ) and the integrated circuit devices 50 that are bondedto the singulated portion of the wafer 70. The integrated circuitpackages 100 are then mounted to a package substrate 200. In anembodiment, the resulting device is a chip-on-wafer-on-substrate (CoWoS)package, although it should be appreciated that embodiments may beapplied to other 3DIC packages.

In FIG. 2 , a wafer 70 is obtained. The wafer 70 comprises devices inthe package regions 100A, 100B, which will be singulated in subsequentprocessing to be included in the integrated circuit packages 100. Thedevices formed in the wafer 70 may be interposers, integrated circuitsdies, or the like. The wafer 70 includes a substrate 72, an interconnectstructure 74, die connectors 76, a dielectric layer 78, and conductivevias 80.

The substrate 72 may be a bulk semiconductor substrate, asemiconductor-on-insulator (SOI) substrate, a multi-layeredsemiconductor substrate, or the like. The substrate 72 may include asemiconductor material, such as silicon; germanium; a compoundsemiconductor including silicon carbide, gallium arsenide, galliumphosphide, indium phosphide, indium arsenide, and/or indium antimonide;an alloy semiconductor including silicon-germanium, gallium arsenidephosphide, aluminum indium arsenide, aluminum gallium arsenide, galliumindium arsenide, gallium indium phosphide, and/or gallium indiumarsenide phosphide; or combinations thereof. Other substrates, such asmulti-layered or gradient substrates, may also be used. The substrate 72may be doped or undoped. In embodiments where interposers are formed inthe wafer 70, the substrate 72 generally does not include active devicestherein, although the interposers may include passive devices formed inand/or on a front surface (e.g., the surface facing upward) of thesubstrate 72. In embodiments where integrated circuits devices areformed in the wafer 70, active devices such as transistors, capacitors,resistors, diodes, and the like, may be formed in and/or on the frontsurface of the substrate 72.

The interconnect structure 74 is over the front surface of the substrate72, and is used to electrically connect the devices (if any) of thesubstrate 72. The interconnect structure 74 may include one or moredielectric layer(s) and respective metallization pattern(s) in thedielectric layer(s). Acceptable dielectric materials for the dielectriclayers include oxides such as silicon oxide or aluminum oxide; nitridessuch as silicon nitride; carbides such as silicon carbide; the like; orcombinations thereof such as silicon oxynitride, silicon oxycarbide,silicon carbonitride, silicon oxycarbonitride or the like. Otherdielectric materials may also be used, such as a polymer such aspolybenzoxazole (PBO), polyimide, a benzocyclobuten (BCB) based polymer,or the like. The metallization patterns may include conductive viasand/or conductive lines to interconnect any devices together and/or toan external device. The metallization patterns may be formed of aconductive material, such as a metal, such as copper, cobalt, aluminum,gold, combinations thereof, or the like. The interconnect structure 74may be formed by a damascene process, such as a single damasceneprocess, a dual damascene process, or the like.

The die connectors 76 are at a front side 70F of the wafer 70. The dieconnectors 76 may be conductive pillars, pads, or the like, to whichexternal connections are made. The die connectors 76 are in and/or onthe interconnect structure 74. For example, the die connectors 76 may bepart of an upper metallization pattern of the interconnect structure 74.The die connectors 76 can be formed of a metal, such as copper,aluminum, or the like, and can be formed by, for example, plating, orthe like.

The dielectric layer 78 is at the front side 70F the wafer 70. Thedielectric layer 78 is in and/or on the interconnect structure 74. Forexample, the dielectric layer 78 may be an upper dielectric layer of theinterconnect structure 74. The dielectric layer 78 laterallyencapsulates the die connectors 76. The dielectric layer 78 may be anoxide, a nitride, a carbide, a polymer, the like, or a combinationthereof. The dielectric layer 78 may be formed, for example, by spincoating, lamination, chemical vapor deposition (CVD), or the like.Initially, the dielectric layer 78 may bury the die connectors 76, suchthat the top surface of the dielectric layer 78 is above the topsurfaces of the die connectors 76. The die connectors 76 are exposedthrough the dielectric layer 78 during formation of the wafer. A removalprocess can be applied to the various layers to remove excess materialsover the die connectors 76. The removal process may be a planarizationprocess such as a chemical mechanical polish (CMP), an etch-back,combinations thereof, or the like. After planarization, the top surfacesof the die connectors 76 and the dielectric layer 78 are coplanar(within process variations) and are exposed at the front side 70F of thewafer 70. As will be described in greater detail below, the planarizedfront side 70F of the wafer 70 will be bonded to other devices, such asintegrated circuit devices.

The conductive vias 80 extend into the interconnect structure 74 and/orthe substrate 72. The conductive vias 80 are electrically coupled tometallization patterns of the interconnect structure 74. The conductivevias 80 are also sometimes referred to as TSVs. As an example to formthe conductive vias 80, recesses can be formed in the interconnectstructure 74 and/or the substrate 72 by, for example, etching, milling,laser techniques, a combination thereof, and/or the like. A thindielectric material may be formed in the recesses, such as by using anoxidation technique. A thin barrier layer may be conformally depositedin the openings, such as by CVD, atomic layer deposition (ALD), physicalvapor deposition (PVD), thermal oxidation, a combination thereof, and/orthe like. The barrier layer may be formed from an oxide, a nitride, acarbide, combinations thereof, or the like. A conductive material may bedeposited over the barrier layer and in the openings. The conductivematerial may be formed by an electro-chemical plating process, CVD, ALD,PVD, a combination thereof, and/or the like. Examples of conductivematerials are copper, tungsten, aluminum, silver, gold, a combinationthereof, and/or the like. Excess conductive material and barrier layeris removed from a surface of the interconnect structure 74 or thesubstrate 72 by, for example, a CMP. Remaining portions of the barrierlayer and conductive material form the conductive vias 80.

Integrated circuit devices 50 are bonded to the wafer 70. In thisembodiment, the integrated circuit devices 50 include multipleintegrated circuit devices 50A, 503 that are placed in each of thepackage regions 100A, 100B. The integrated circuit devices 50A, 503 mayeach have a single function (e.g., a logic device, memory device, etc.),or may have multiple functions (e.g., a SoC). In an embodiment, theintegrated circuit devices 50A are logic devices and the integratedcircuit devices 50B are memory devices. In this embodiment, anintegrated circuit device 50A (e.g., a logic device) and an integratedcircuit device 50B (e.g., a memory device) are bonded in each of thepackage regions 100A, 100B. In another embodiment, a single integratedcircuit device 50 is bonded in each of the package regions 100A, 100B.

The integrated circuit devices 50 and the wafer 70 are directly bondedin a face-to-face manner by hybrid bonding, such that the front sides50F of the integrated circuit devices 50 are bonded to the front side70F of the wafer 70. Specifically, the dielectric layers 58 of theintegrated circuit devices 50 are bonded to the dielectric layer 78 ofthe wafer 70 through dielectric-to-dielectric bonding, without using anyadhesive material (e.g., die attach film), and the die connectors 56 ofthe integrated circuit devices 50 are bonded to the die connectors 76 ofthe wafer 70 through metal-to-metal bonding, without using any eutecticmaterial (e.g., solder). The bonding may include a pre-bonding and anannealing. During the pre-bonding, a small pressing force is applied topress the integrated circuit devices 50 against the wafer 70. Thepre-bonding is performed at a low temperature, such as room temperature,such as a temperature in the range of about 15° C. to about 30° C., andafter the pre-bonding, the dielectric layers 58, 78 are bonded to eachother. The bonding strength is then improved in a subsequent annealingstep, in which the dielectric layers 58, 78 are annealed at a hightemperature, such as a temperature in the range of about 100° C. toabout 450° C. After the annealing, bonds, such as fusions bonds, areformed bonding the dielectric layers 58, 78. For example, the bonds canbe covalent bonds between the material of the dielectric layers 58 andthe material of the dielectric layer 78. The die connectors 56, 76 areconnected to each other with a one-to-one correspondence. The dieconnectors 56, 76 may be in physical contact after the pre-bonding, ormay expand to be brought into physical contact during the annealing.Further, during the annealing, the material of the die connectors 56, 76(e.g., copper) intermingles, so that metal-to-metal bonds are alsoformed. Hence, the resulting bonds between the integrated circuitdevices 50 and wafer 70 are hybrid bonds that include bothdielectric-to-dielectric bonds and metal-to-metal bonds.

The width of each integrated circuit device 50 is less than the width ofthe wafer 70, so that multiple integrated circuit devices 50 can bebonded to the wafer 70. As will be described in greater detail below,the integrated circuit devices 50A can also have different widths fromthe integrated circuit devices 50B. When the integrated circuit devices50 and the wafer 70 are bonded by hybrid bonding, outer edges 50E andinner edges 50N of the integrated circuit devices 50 interface with theplanarized surface of the dielectric layer 78. The outer edges 50E ofthe integrated circuit devices 50 are those edges of the integratedcircuit devices 50 in each respective package region 100A, 100B thatface away from others of the integrated circuit devices 50 in therespective package region 100A, 100B. The inner edges 50N of theintegrated circuit devices 50 are those edges of the integrated circuitdevices 50 in each respective package region 100A, 100B that facetowards others of the integrated circuit devices 50 in the respectivepackage region 100A, 100B. The outer edges 50E undergo a large amount ofstress, such as more stress than the inner edges 50N, which can beexacerbated when the integrated circuit devices 50 are encapsulated insubsequent processing with a material that has a large Young's modulusand/or a large coefficient of thermal expansion (CTE). Excessive stressat the outer edges 50E can damage the integrated circuit devices 50(e.g., the interconnect structures 54 and/or the dielectric layers 58),the wafer 70 (e.g., the interconnect structure 74 and/or the dielectriclayer 78), or both. For example, delamination of the dielectric layers58, 78 may occur. As will be described in greater detail below, layerswill be formed around the outer edges 50E to buffer the stress at theouter edges 50E. The yield and reliability of the integrated circuitpackages 100 may thus be improved, particularly when the integratedcircuit devices 50 are subsequently encapsulated.

In FIG. 3 , buffer layers 108 are dispensed on the front side 70F of thewafer 70 and around the integrated circuit devices 50. Specifically, abuffer layer 108 is dispensed around the integrated circuit devices 50in each of the package regions 100A, 100B. The buffer layers 108 areformed in location that experience high stress (e.g., the outer edges50E of the integrated circuit devices 50). The buffer layers 108 areformed of a stress reduction material that helps buffer stress at theouter edges 50E (see FIG. 2 ). The stress reduction material includes apolymer material and optionally includes fillers and/or a surfactant.The polymer material may be an epoxy, a polyimide-based material, aBCB-based material, a silicone material, an acrylic material, or thelike. The fillers are formed of a material that provides mechanicalstrength and thermal dispersion for the buffer layers 108, such asparticles of silica (SiO₂). The surfactant may be polyvinyl alcohol orthe like. The stress reduction material (including the polymer material,the fillers, and/or the surfactant) may be formed by printing (e.g.,inkjet printing), dispensing (e.g., standard dispensing, tiltdispensing, etc.), spin coating, lamination, deposition, or the like.

In this embodiment, the buffer layers 108 have fillet portions 108F andgap portions 108G. The gap portions 108G are disposed in the gapsbetween the integrated circuit devices 50. The fillet portions 108F aredisposed and extend along the outer edges 50E of the integrated circuitdevices 50. In other embodiments, the gap portions 108G are omitted andbuffer layers 108 only have the fillet portions 108F.

In this embodiment, the fillet portions 108F and the gap portions 108Ghave straight top surfaces. In other embodiments, the fillet portions108F and/or the gap portions 108G have concave top surfaces. The typesof top surfaces can be determined by the amount (e.g., volume) of stressreduction material that is dispensed, and whether a surfactant isincluded in the stress reduction material. As will be described ingreater detail below, dispensing less stress reduction material and/orincluding a surfactant can form concave top surfaces.

In this embodiment, the buffer layers 108 extend completely up thesidewalls of the integrated circuit devices 50, such that no portions ofthe sidewalls of the integrated circuit devices 50 are exposed to (e.g.,contacted by) a subsequently formed encapsulant. In other embodiments,the buffer layers 108 can extend partially up the sidewalls of theintegrated circuit devices 50, such that portions of the sidewalls ofthe integrated circuit devices 50 are exposed to the subsequently formedencapsulant. As will be described in greater detail below, dispensingless stress reduction material can form the buffer layers 108 to extendup less of the sidewalls of the integrated circuit devices 50.

In FIG. 4 , an encapsulant 110 is formed on the various components. Theencapsulant 110 is formed of a molding material or compound. The moldingmaterial includes a polymer material and optionally includes fillers.The polymer material may be an epoxy or the like. The fillers are formedof a material that provides mechanical strength and thermal dispersionfor the encapsulant 110, such as particles of silica (SiO₂). The moldingmaterial (including the polymer material and/or the fillers) may beformed by compression molding, transfer molding, or the like. Thepolymer material of the encapsulant 110 is different from the polymermaterial of the buffer layers 108, and is formed by a different methodthan the stress reduction material of the buffer layers 108. Theencapsulant 110 may be formed over the front side 70F of the wafer 70such that the integrated circuit devices 50 and the buffer layers 108are buried or covered. The encapsulant 110 is then cured. Aplanarization process may be performed to planarize the top surface ofthe encapsulant 110. The planarization process may be a chemicalmechanical polish (CMP), an etch-back, combinations thereof, or thelike. In the illustrated embodiment, the integrated circuit devices 50remain covered after the encapsulant 110 is planarized. In anotherembodiment, the integrated circuit devices 50 are exposed by theplanarization of the encapsulant 110.

The encapsulant 110 surrounds and protects the integrated circuitdevices 50. However, the molding material of the encapsulant 110 has alarger Young's modulus and a larger CTE than the dielectric material ofthe dielectric layers 58, 78. Expansion of the encapsulant 110 at hightemperatures can impart stress on the integrated circuit devices 50,particularly at the outer edges 50E, which can damage the integratedcircuit devices 50 and/or the wafer 70. The buffer layers 108 are formedof a stress reduction material that is softer than the encapsulant 110at high temperatures, and thus helps buffer stress imparted by theencapsulant 110 at the outer edges 50E (see FIG. 2 ) during expansion.The stress reduction material of the buffer layers 108 has severalproperties that allow it to effectively buffer stress from the moldingmaterial of the encapsulant 110 at high temperatures. Specifically, thestress reduction material of the buffer layers 108 has a differentYoung's modulus, a different CTE, a different filler load (e.g.,quantity of fillers), a different average filler particle size, and adifferent elongation than the molding material of the encapsulant 110.

The stress reduction material of the buffer layers 108 has a lowerYoung's modulus than the molding material of the encapsulant 110. Insome embodiments, the Young's modulus of the stress reduction materialis from about 5% to about 90% of the Young's modulus of the moldingmaterial. For example, the stress reduction material can have a Young'smodulus in the range of about 0.001 GPa to about 0.9 GPa, and themolding material can have a Young's modulus in the range of about 1 GPato about 2.5 GPa.

The stress reduction material of the buffer layers 108 has a similar orgreater CTE than the molding material of the encapsulant 110. In someembodiments, the CTE of the stress reduction material is from about 150%to about 500% of the CTE of the molding material. For example, thestress reduction material can have a CTE in the range of about 15 ppm/°C. to about 70 ppm/° C. below its Glass Transition Temperature (T_(g))and a CTE in the range of about 50 ppm/° C. to about 300 ppm/° C. aboveits T_(g), and the molding material can have a CTE in the range of about5 ppm/° C. to about 22 ppm/° C. below its T_(g) and a CTE in the rangeof about 22 ppm/° C. to about 60 ppm/° C. above its T_(g).

The stress reduction material of the buffer layers 108 has a smallerfiller load than the molding material of the encapsulant 110 (when thestress reduction material and the molding material both includefillers). In some embodiments, the filler load of the stress reductionmaterial is from about 0% to about 90% of the filler load of the moldingmaterial. For example, the stress reduction material can have a fillerload in the range of about 0% to about 78%, and the molding material canhave a filler load in the range of about 75% to about 92%.

The stress reduction material of the buffer layers 108 has a smalleraverage filler particle size than the molding material of theencapsulant 110 (when the stress reduction material and the moldingmaterial both include fillers). In some embodiments, the average fillerparticle size of the stress reduction material is from about 0.2% toabout 60% of the average filler particle size of the molding material.For example, the stress reduction material can have an average fillerparticle size in the range of about 0.01 μm to about 10 μm, and themolding material can have an average filler particle size in the rangeof about 5 μm to about 50 μm.

The stress reduction material of the buffer layers 108 has a greaterelongation than the molding material of the encapsulant 110. In someembodiments, the elongation of the stress reduction material is fromabout 120% to about 5000% of the elongation of the molding material. Forexample, the stress reduction material can have an elongation in therange of about 2%δ to about 100%δ, and the molding material can have anelongation in the range of about 1.2%δ to about 5%δ.

Forming the stress reduction material of the buffer layers 108 and themolding material of the encapsulant 110 with a Young's modulus, CTE,filler load, average filler particle size, and elongation in the rangesdiscussed above allows the buffer layers 108 to buffer enough stressfrom the encapsulant 110 to avoid damage to the integrated circuitdevices 50 and/or the wafer 70 at the outer edges 50E. Forming thestress reduction material of the buffer layers 108 and the moldingmaterial of the encapsulant 110 with a Young's modulus, CTE, fillerload, average filler particle size, or elongation outside the rangesdiscussed above may not allow the buffer layers 108 to buffer enoughstress from the encapsulant 110 to avoid damage to the integratedcircuit devices 50 and/or the wafer 70 at the outer edges 50E.

In addition to the differing properties discussed above, the bufferlayers 108 and the encapsulant 110 both have different properties fromthe dielectric layers 58, 78. Specifically, the dielectric material ofthe dielectric layers 58, 78 has a greater Young's modulus and a lesserCTE than both the stress reduction material of the buffer layers 108 andthe molding material of the encapsulant 110. In some embodiments, theYoung's modulus of the molding material is from about 3% to about 50%the Young's modulus of the dielectric material, and the Young's modulusof the stress reduction material is from about 6% to about 30% theYoung's modulus of the dielectric material. In some embodiments, the CTEof the molding material is from about 500% to about 2500% the CTE of thedielectric material, and the CTE of the stress reduction material isfrom about 3000% to about 30000% the CTE of the dielectric material.Continuing the above example, the dielectric material can have a Young'smodulus in the range of about 30 GPa to about 300 GPa, and can have aCTE in the range of about 0.3 ppm/° C. to about 5 ppm/° C.

In FIG. 5 , the intermediate structure is flipped over (not illustrated)to prepare for processing of the back side 70B of the substrate 72. Theintermediate structure may be placed on a carrier substrate 112 or othersuitable support structure for subsequent processing. For example, thecarrier substrate 112 may be attached to the encapsulant 110. Thecarrier substrate 112 may be attached to the encapsulant 110 by arelease layer. The release layer may be formed of a polymer-basedmaterial, which may be removed along with the carrier substrate 112 fromthe structure after processing. In some embodiments, the carriersubstrate 112 is a substrate such as a bulk semiconductor or a glasssubstrate. In some embodiments, the release layer is an epoxy-basedthermal-release material, which loses its adhesive property when heated,such as a light-to-heat-conversion (LTHC) release coating.

In FIG. 6 , the substrate 72 is thinned to expose the conductive vias80. Exposure of the conductive vias 80 may be accomplished by a thinningprocess, such as a grinding process, a chemical-mechanical polish (CMP),an etch-back, combinations thereof, or the like. In the illustratedembodiment, a recessing process is performed to recess the back surfaceof the substrate 72 such that the conductive vias 80 protrude at theback side 70B of the wafer 70. The recessing process may be, e.g., asuitable etch-back process, chemical-mechanical polish (CMP), or thelike. In some embodiments, the thinning process for exposing theconductive vias 80 includes a CMP, and the conductive vias 80 protrudeat the back side 70B of the wafer 70 as a result of dishing that occursduring the CMP. An insulating layer 114 is then formed on the backsurface of the substrate 72, surrounding the protruding portions of theconductive vias 80. In some embodiments, the insulating layer 114 isformed from a silicon-containing insulator, such as, silicon nitride,silicon oxide, silicon oxynitride, or the like, and may be formed by asuitable deposition method such as spin coating, CVD, plasma-enhancedCVD (PECVD), high density plasma CVD (HDP-CVD), or the like. Initially,the insulating layer 114 may bury the conductive vias 80. A removalprocess can be applied to the various layers to remove excess materialsover the conductive vias 80. The removal process may be a planarizationprocess such as a chemical mechanical polish (CMP), an etch-back,combinations thereof, or the like. After planarization, the exposedsurfaces of the conductive vias 80 and the insulating layer 114 arecoplanar (within process variations) and are exposed at the back side70B of the wafer 70. In another embodiment, the insulating layer 114 isomitted, and the exposed surfaces of the substrate 72 and the conductivevias 80 are coplanar (within process variations).

In FIG. 7 , under bump metallurgies (UBMs) 132 are formed on the exposedsurfaces of the conductive vias 80 and the insulating layer 114 (or thesubstrate 72, when the insulating layer 114 is omitted). As an exampleto form the UBMs 132, a seed layer (not illustrated) is formed over theexposed surfaces of the conductive vias 80 and the insulating layer114/substrate 72. In some embodiments, the seed layer is a metal layer,which may be a single layer or a composite layer including a pluralityof sub-layers formed of different materials. In some embodiments, theseed layer includes a titanium layer and a copper layer over thetitanium layer. The seed layer may be formed using, for example, PVD orthe like. A photoresist is then formed and patterned on the seed layer.The photoresist may be formed by spin coating or the like and may beexposed to light for patterning. The pattern of the photoresistcorresponds to the UBMs 132. The patterning forms openings through thephotoresist to expose the seed layer. A conductive material is thenformed in the openings of the photoresist and on the exposed portions ofthe seed layer. The conductive material may be formed by plating, suchas electroplating or electroless plating, or the like. The conductivematerial may include a metal, such as copper, titanium, tungsten,aluminum, or the like. Then, the photoresist and portions of the seedlayer on which the conductive material is not formed are removed. Thephotoresist may be removed by an acceptable ashing or stripping process,such as using an oxygen plasma or the like. Once the photoresist isremoved, exposed portions of the seed layer are removed, such as byusing an acceptable etching process. The remaining portions of the seedlayer and conductive material form the UBMs 132.

Further, conductive connectors 136 are formed on the UBMs 132. Theconductive connectors 136 may be ball grid array (BGA) connectors,solder balls, metal pillars, controlled collapse chip connection (C4)bumps, micro bumps, electroless nickel-electroless palladium-immersiongold technique (ENEPIG) formed bumps, or the like. The conductiveconnectors 136 may include a conductive material such as solder, copper,aluminum, gold, nickel, silver, palladium, tin, the like, or acombination thereof. In some embodiments, the conductive connectors 136are formed by initially forming a layer of solder through evaporation,electroplating, printing, solder transfer, ball placement, or the like.Once a layer of solder has been formed on the structure, a reflow may beperformed in order to shape the material into desired bump shapes. Inanother embodiment, the conductive connectors 136 comprise metal pillars(such as copper pillars) formed by sputtering, printing, electroplating, electroless plating, CVD, or the like. The metal pillars may besolder-free and have substantially vertical sidewalls. In someembodiments, a metal cap layer is formed on the top of the metalpillars. The metal cap layer may include nickel, tin, tin-lead, gold,silver, palladium, indium, nickel-palladium-gold, nickel-gold, the like,or a combination thereof and may be formed by a plating process.

In FIG. 8 , a carrier debonding is performed to detach (debond) thecarrier substrate 112 from the encapsulant 110. In embodiments where thecarrier substrate 112 is attached to the encapsulant 110 by a releaselayer, the debonding includes projecting a light such as a laser lightor an ultraviolet (UV) light on the release layer so that the releaselayer decomposes under the heat of the light and the carrier substrate112 can be removed. The structure is then flipped over and placed on atape (not illustrated).

The encapsulant 110 is then thinned to expose the integrated circuitdevices 50. Exposure of the integrated circuit devices 50 may beaccomplished by a thinning process, such as a grinding process, achemical-mechanical polish (CMP), an etch-back, combinations thereof, orthe like. After the thinning process, the top surfaces of theencapsulant 110 and the integrated circuit devices 50 are coplanar(within process variations). The thinning is performed until a desiredamount of the encapsulant 110 has been removed. Although the bufferlayers 108 protect the outer edges 50E from stress, the encapsulant 110provides more overall protection for the resulting integrated circuitpackages 100 than the buffer layers 108. Thus, enough of the encapsulant110 remains after thinning so that the integrated circuit packages 100contain more of the encapsulant 110 (by volume) than the buffer layers108. In some embodiments, the volume of the buffer layers 108 is fromabout 2% to about 10% of the volume of the encapsulant 110. For example,in each integrated circuit package 100, the buffer layers 108 can have avolume in the range of about 0.26 mm³ to about 1.3 mm³ when theencapsulant 110 has a volume of about 13 mm³. In this embodiment, thetop surfaces of the fillet portions 108F and the gap portions 108G (seeFIG. 3 ) and the encapsulant 110 are also coplanar (within processvariations). In other embodiments, some or all of the top surfaces ofthe buffer layers 108 are disposed below the top surface of theencapsulant 110.

In FIG. 9 , a singulation process is performed by cutting along scribeline regions, e.g., between the package regions 100A, 100B. Thesingulation process may include sawing, dicing, or the like. Forexample, the singulation process can include sawing the insulating layer114, the encapsulant 110, the dielectric layer 78, the interconnectstructure 74, and the substrate 72. The singulation process singulatesthe package regions 100A, 100B from one another. The resulting,singulated integrated circuit package 100 is from one of the packageregions 100A, 100B. The singulation process forms interposers 140 fromthe singulated portions of the wafer 70 and the insulating layer 114 (ifpresent). Each of the integrated circuit packages 100 includes aninterposer 140. As a result of the singulation process, the outersidewalls of the interposer 140 and the encapsulant 110 are laterallycoterminous (within process variations).

The integrated circuit package 100 is then flipped and attached to apackage substrate 200 using the conductive connectors 136. The packagesubstrate 200 includes a substrate core 202, which may be made of asemiconductor material such as silicon, germanium, diamond, or the like.Alternatively, compound materials such as silicon germanium, siliconcarbide, gallium arsenic, indium arsenide, indium phosphide, silicongermanium carbide, gallium arsenic phosphide, gallium indium phosphide,combinations of these, and the like, may also be used. Additionally, thesubstrate core 202 may be a SOI substrate. Generally, an SOI substrateincludes a layer of a semiconductor material such as epitaxial silicon,germanium, silicon germanium, SOI, SGOI, or combinations thereof. Thesubstrate core 202 is, in one alternative embodiment, an insulating coresuch as a fiberglass reinforced resin core. One example core material isfiberglass resin such as FR4. Alternatives for the core material includebismaleimide-triazine (BT) resin, or alternatively, other printedcircuit board (PCB) materials or films. Build up films such as Ajinomotobuild-up film (ABF) or other laminates may be used for substrate core202.

The substrate core 202 may include active and passive devices (notillustrated). Devices such as transistors, capacitors, resistors,combinations of these, and the like may be used to generate thestructural and functional requirements of the design for the system. Thedevices may be formed using any suitable methods.

The substrate core 202 may also include metallization layers and vias(not illustrated) and bond pads 204 over the metallization layers andvias. The metallization layers may be formed over the active and passivedevices and are designed to connect the various devices to formfunctional circuitry. The metallization layers may be formed ofalternating layers of dielectric material (e.g., low-k dielectricmaterial) and conductive material (e.g., copper) with viasinterconnecting the layers of conductive material, and may be formedthrough any suitable process (such as deposition, damascene, dualdamascene, or the like). In some embodiments, the substrate core 202 issubstantially free of active and passive devices.

The conductive connectors 136 are reflowed to attach the UBMs 132 to thebond pads 204. The conductive connectors 136 connect the integratedcircuit package 100, including metallization patterns of theinterconnect structure 74, to the package substrate 200, includingmetallization layers in the substrate core 202. Thus, the packagesubstrate 200 is electrically connected to the integrated circuitdevices 50. In some embodiments, passive devices (e.g., surface mountdevices (SMDs), not illustrated) may be attached to the integratedcircuit package 100 (e.g., bonded to the UBMs 132) prior to mounting onthe package substrate 200. In such embodiments, the passive devices maybe bonded to a same surface of the integrated circuit package 100 as theconductive connectors 136. In some embodiments, passive devices (e.g.,SMDs, not illustrated) may be attached to the package substrate 200,e.g., to the bond pads 204.

In some embodiments, an underfill 206 is formed between the integratedcircuit package 100 and the package substrate 200, surrounding theconductive connectors 136 and the UBMs 132. The underfill 206 may beformed by a capillary flow process after the integrated circuit package100 is attached or may be formed by a suitable deposition method beforethe integrated circuit package 100 is attached. The underfill 206 may bea continuous material extending from the package substrate 200 to theinterposer 140 (e.g., the insulating layer 114). The material of theunderfill 206 is different from the stress reduction material of thebuffer layers 108, and is formed by a different method than the stressreduction material of the buffer layers 108.

Optionally, a heat spreader 208 is attached to the integrated circuitpackage 100. The heat spreader 208 may be formed from a material withhigh thermal conductivity, such as steel, stainless steel, copper, thelike, or combinations thereof. The heat spreader 208 protects theintegrated circuit package 100 and forms a thermal pathway to conductheat from the various components of the integrated circuit package 100(e.g., the integrated circuit devices 50). The heat spreader 208 is incontact with the integrated circuit devices 50, the encapsulant 110, andoptionally the buffer layers 108.

FIG. 10 is a cross-sectional view of an integrated circuit package, inaccordance with some embodiments. This embodiment is similar to theembodiment described with respect to FIG. 9 , except the gap portion108G has a concave top surface while the fillet portions 108F havestraight top surfaces. At least a portion of the top surface of the gapportion 108G is thus disposed below and buried beneath the top surfaceof the encapsulant 110. The gap portion 108G can be formed with aconcave top surface by dispensing less stress reduction material of thebuffer layer 108 than the embodiment of FIG. 9 . For example, the volumeof the buffer layer 108 in this embodiment can be from about 70% toabout 95% of the volume of the buffer layer 108 in the embodiment ofFIG. 9 .

FIG. 11 is a cross-sectional view of an integrated circuit package, inaccordance with some embodiments. This embodiment is similar to theembodiment described with respect to FIG. 10 , except the buffer layer108 extends only partially up the sidewalls of the integrated circuitdevices 50, such that portions of the sidewalls of the integratedcircuit devices 50 are exposed to the encapsulant 110. Specifically, thebuffer layer 108 covers the sidewalls of the interconnect structure 54and a portion of the sidewalls of the semiconductor substrate 52 (seeFIG. 1 ). The top surfaces of the fillet portions 108F and the gapportion 108G are thus disposed below and buried beneath the top surfaceof the encapsulant 110. The buffer layer 108 can be formed to extendonly partially up the sidewalls of the integrated circuit devices 50 bydispensing less stress reduction material of the buffer layer 108 thanthe embodiment of FIG. 10 . For example, the volume of the buffer layer108 in this embodiment can be from about 50% to about 80% of the volumeof the buffer layer 108 in the embodiment of FIG. 10 . Further, thethickness T₁ of the buffer layer 108 is larger than the thickness T₂ ofthe dielectric layer 78, which can help further reduce the stress at theouter edges 50E.

FIG. 12 is a cross-sectional view of an integrated circuit package, inaccordance with some embodiments. This embodiment is similar to theembodiment described with respect to FIG. 10 , except the filletportions 108F and the gap portion 108G each have concave top surfaces.At least a portion of the top surface of the gap portion 108G is thusdisposed below and buried beneath the top surface of the encapsulant110. The fillet portions 108F and the gap portion 108G can be formedwith concave top surfaces by dispensing less stress reduction materialof the buffer layer 108 than the embodiment of FIG. 10 and/or byincluding a surfactant in the stress reduction material. For example,the volume of the buffer layer 108 in this embodiment can be from about50% to about 70% of the volume of the buffer layer 108 in the embodimentof FIG. 10 . Also in this embodiment, the buffer layer 108 extendscompletely up the sidewalls of the integrated circuit devices 50, suchthat no portions of the sidewalls of the integrated circuit devices 50are exposed to the encapsulant 110. Specifically, the buffer layer 108covers the sidewalls of the interconnect structure 54 and the sidewallsof the semiconductor substrate 52 (see FIG. 1 ).

FIG. 13 is a cross-sectional view of an integrated circuit package, inaccordance with some embodiments. This embodiment is similar to theembodiment described with respect to FIG. 12 , except the buffer layer108 extends only partially up the sidewalls of the integrated circuitdevices 50, such that portions of the sidewalls of the integratedcircuit devices 50 are exposed to the encapsulant 110. Specifically, thebuffer layer 108 covers the sidewalls of the interconnect structure 54and a portion of the sidewalls of the semiconductor substrate 52 (seeFIG. 1 ). The top surfaces of the fillet portions 108F and the gapportion 108G are thus disposed below and buried beneath the top surfaceof the encapsulant 110. The buffer layer 108 can be formed to extendonly partially up the sidewalls of the integrated circuit devices 50 bydispensing less stress reduction material of the buffer layer 108 thanthe embodiment of FIG. 12 . For example, the volume of the buffer layer108 in this embodiment can be from about 50% to about 80% of the volumeof the buffer layer 108 in the embodiment of FIG. 12 . The thickness T₁of the buffer layer 108 is larger than the thickness T₂ of thedielectric layer 78, which can help further reduce the stress at theouter edges 50E.

FIG. 14 is a cross-sectional view of an integrated circuit package, inaccordance with some embodiments. This embodiment is similar to theembodiment described with respect to FIG. 9 , except the buffer layer108 is at least partially disposed between the interposer 140 and eachof the integrated circuit devices 50. The integrated circuit devices 50have tapered sidewalls, with widths that increase in a directionextending from the back sides of the integrated circuit devices 50 tothe front sides of the integrated circuit devices 50. The integratedcircuit devices 50 can be formed with tapered sidewalls by performing atrimming process at edges of the semiconductor substrate 52 and/or theinterconnect structure 54 (see FIG. 1 ) before bonding the integratedcircuit devices 50 to the interposer 140. The trimming process caninclude a mechanical, laser, or plasma sawing process. Forming theintegrated circuit devices 50 with tapered sidewalls can help furtherreduce the stress at the outer edges 50E.

FIG. 15 is a cross-sectional view of an integrated circuit package, inaccordance with some embodiments. This embodiment is similar to theembodiment described with respect to FIG. 9 , except multiple integratedcircuit packages 100 are attached to a same package substrate 200, and asame heat spreader 208 is attached to each of the integrated circuitpackages 100. In an embodiment, the resulting device is a multi-chipmodule (MCM) package, although it should be appreciated that embodimentsmay be applied to other 3DIC packages. A same underfill 206 can beformed between the package substrate 200 and each of the integratedcircuit packages 100.

FIGS. 16A through 16E are top-down views of integrated circuit packages,in accordance with various embodiments. Several layouts for the bufferlayer 108 are illustrated. As shown in the top-down views, theintegrated circuit devices 50 have four corners 50C and four sidewalls50S, with each sidewall 50S extending between two corners 50C. As isalso more clearly shown, the integrated circuit devices 50A can havegreater widths than the integrated circuit devices 503 in multipledirections.

In FIG. 16A, both the fillet portions 108F and the gap portion 108G areexposed through the encapsulant 110 after thinning of the encapsulant110. FIG. 16A may be a top-down view of the embodiment of FIG. 9 . Inthis embodiment, the exposed fillet portions 108F extend around thecorners 50C of the integrated circuit devices 50 and extend continuouslyalong the sidewalls 50S of the integrated circuit devices 50.

In FIG. 16B, some of the fillet portions 108F are exposed through theencapsulant 110 after thinning of the encapsulant 110, but the gapportion 108G remains covered after thinning of the encapsulant 110. FIG.16B may be a top-down view of the embodiment of FIG. 10 . In thisembodiment, the exposed fillet portions 108F extend around the corners50C of the integrated circuit devices 50 and extend discontinuouslyalong the sidewalls 50S of the integrated circuit devices 50.

In FIG. 16C, neither the fillet portions 108F nor the gap portion 108Gare exposed through the encapsulant 110, but rather remain covered afterthinning of the encapsulant 110. FIG. 16C may be a top-down view of theembodiments of FIGS. 11 and 13 .

In FIG. 16D, the gap portion 108G is exposed through the encapsulant 110after thinning of the encapsulant 110, but the fillet portions 108Fremain covered after thinning of the encapsulant 110. FIG. 16D may be atop-down view of the embodiment of FIG. 9 .

In FIG. 16E, some of the fillet portions 108F are exposed through theencapsulant 110 after thinning of the encapsulant 110, but the gapportion 108G remains covered after thinning of the encapsulant 110. FIG.16E may be a top-down view of the embodiment of FIG. 10 . In thisembodiment, the buffer layer 108 includes first portions 108A formed ofa first polymer material and second portions 108B formed of a secondpolymer material. The first portions 108A can be those portions aroundthe outer edges 50E of the integrated circuit devices 50. The secondportions 108B can be those portions around the inner edges 50N of theintegrated circuit devices 50. The first polymer material and the secondpolymer material are each similar to the stress reduction materialdiscussed above for FIG. 3 , and are different stress reductionmaterials from one another. For example, the first portions 108A canhave a lesser Young's modulus/CTE than the second portions 108B. Inother words, in the embodiments of FIGS. 16A through 16D, the bufferlayer 108 includes a single stress reduction material, but in theembodiment of FIG. 16E, the buffer layer 108 includes a plurality ofstress reduction materials. The stress reduction materials can beselected based on the amount of stress buffering desired in the variousregions of the integrated circuit packages 100.

Embodiments may achieve advantages. When the integrated circuit devices50 are directly bonded to the wafer 70 by hybrid bonding, expansion ofthe encapsulant 110 at high temperatures can impart stress on theintegrated circuit devices 50, particularly at the outer edges 50E,which can damage the integrated circuit devices 50 and/or the wafer 70.For example, delamination of the dielectric layers 58, 78 may occur. Thebuffer layers 108 help buffer stress in regions of the integratedcircuit packages 100 that experience high stress, such as the outeredges 50E of the integrated circuit devices 50. Specifically, the bufferlayers 108 are formed of a stress reduction material that expands lessthan the encapsulant 110 at high temperatures, and thus helps bufferstress imparted by the encapsulant 110 during expansion. The integratedcircuit packages 100 may be repeatedly subjected to high temperaturesduring manufacturing, such as during testing. Forming the buffer layers108 helps protect the integrated circuit packages 100 during hightemperature processing, improving the yield and reliability of theintegrated circuit packages 100.

In an embodiment, a method includes: bonding a first integrated circuitdevice and a second integrated circuit device to an interposer withdielectric-to-dielectric bonds and with metal-to-metal bonds; forming astress reduction material around the first integrated circuit device andthe second integrated circuit device, the stress reduction materialhaving a first Young's modulus; encapsulating the stress reductionmaterial, the first integrated circuit device, and the second integratedcircuit device with a molding material, the molding material having asecond Young's modulus, the first Young's modulus less than the secondYoung's modulus; and thinning the molding material to expose the firstintegrated circuit device and the second integrated circuit device.

In some embodiments of the method, the stress reduction materialincludes a first polymer material and the molding material includes asecond polymer material, the first polymer material being different fromthe second polymer material. In some embodiments of the method, thestress reduction material further includes first fillers and the moldingmaterial further includes second fillers. In some embodiments of themethod, the stress reduction material further includes a surfactant. Insome embodiments of the method, the first polymer material is a firstepoxy, a polyimide-based material, a benzocyclobuten (BCB) basedmaterial, a silicone material, or an acrylic material, and the secondpolymer material is a second epoxy. In some embodiments of the method,the stress reduction material has a gap portion and fillet portions, thegap portion disposed between the first integrated circuit device and thesecond integrated circuit device, the fillet portions disposed alongouter edges of the first integrated circuit device and the secondintegrated circuit device, where the gap portion is exposed afterthinning the molding material, and where the fillet portions are exposedafter thinning the molding material. In some embodiments of the method,the stress reduction material has a gap portion and fillet portions, thegap portion disposed between the first integrated circuit device and thesecond integrated circuit device, the fillet portions disposed alongouter edges of the first integrated circuit device and the secondintegrated circuit device, where the gap portion remains covered afterthinning the molding material, and where the fillet portions remaincovered after thinning the molding material. In some embodiments of themethod, the stress reduction material has a gap portion and filletportions, the gap portion disposed between the first integrated circuitdevice and the second integrated circuit device, the fillet portionsdisposed along outer edges of the first integrated circuit device andthe second integrated circuit device, where the gap portion is exposedafter thinning the molding material, and where the fillet portionsremain covered after thinning the molding material. In some embodimentsof the method, the stress reduction material has a gap portion andfillet portions, the gap portion disposed between the first integratedcircuit device and the second integrated circuit device, the filletportions disposed along outer edges of the first integrated circuitdevice and the second integrated circuit device, where the gap portionremains covered after thinning the molding material, and where thefillet portions are exposed after thinning the molding material.

In an embodiment, a device includes: an interposer; a first integratedcircuit device bonded to the interposer with dielectric-to-dielectricbonds and with metal-to-metal bonds; a second integrated circuit devicebonded to the interposer with dielectric-to-dielectric bonds and withmetal-to-metal bonds; a buffer layer around the first integrated circuitdevice and the second integrated circuit device, the buffer layerincluding a stress reduction material having a first Young's modulus;and an encapsulant around the buffer layer, the first integrated circuitdevice, and the second integrated circuit device, the encapsulantincluding a molding material having a second Young's modulus, the firstYoung's modulus less than the second Young's modulus.

In some embodiments of the device, the stress reduction material has afirst coefficient of thermal expansion and the molding material has asecond coefficient of thermal expansion, the first coefficient ofthermal expansion greater than the second coefficient of thermalexpansion. In some embodiments of the device, the stress reductionmaterial includes first fillers with a first filler load and the moldingmaterial includes second fillers with a second filler load, the firstfiller load less than the second filler load. In some embodiments of thedevice, the stress reduction material includes first fillers with afirst average filler particle size and the molding material includessecond fillers with a second average filler particle size, the firstaverage filler particle size less than the second average fillerparticle size. In some embodiments of the device, the stress reductionmaterial has a first elongation and the molding material has a secondelongation, the first elongation less than the second elongation.

In an embodiment, a device includes: an interposer; a first integratedcircuit device bonded to the interposer with dielectric-to-dielectricbonds and with metal-to-metal bonds; a second integrated circuit devicebonded to the interposer with dielectric-to-dielectric bonds and withmetal-to-metal bonds; a buffer layer having a gap portion and filletportions, the gap portion disposed between the first integrated circuitdevice and the second integrated circuit device, the fillet portionsdisposed along outer edges of the first integrated circuit device andthe second integrated circuit device; and an encapsulant around thebuffer layer, the first integrated circuit device, and the secondintegrated circuit device, the encapsulant having a different Young'smodulus, a different coefficient of thermal expansion, a differentfiller load, and a different average filler particle size, and adifferent elongation than the buffer layer.

In some embodiments of the device, the gap portion has a concave topsurface and the fillet portions have concave top surfaces. In someembodiments of the device, the gap portion has a straight top surfaceand the fillet portions have straight top surfaces. In some embodimentsof the device, the gap portion has a concave top surface and the filletportions have straight top surfaces. In some embodiments of the device,the buffer layer includes a single stress reduction material. In someembodiments of the device, the buffer layer includes a plurality ofstress reduction materials.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A method comprising: bonding a first integratedcircuit die and a second integrated circuit die to a substrate withdielectric-to-dielectric bonds and with metal-to-metal bonds; forming astress reduction material around the first integrated circuit die andthe second integrated circuit die, the stress reduction material havinga first Young's modulus; encapsulating the stress reduction material,the first integrated circuit die, and the second integrated circuit diewith a molding material, the molding material having a second Young'smodulus, the first Young's modulus less than the second Young's modulus;and thinning the molding material.
 2. The method of claim 1, whereinthinning the molding material exposes the stress reduction material. 3.The method of claim 1, wherein the stress reduction material comprises afirst polymer material and first fillers.
 4. The method of claim 3,wherein the stress reduction material further comprises a surfactant. 5.The method of claim 3, wherein the first polymer material is a firstepoxy, a polyimide-based material, a benzocyclobuten based material, asilicone material, or an acrylic material.
 6. The method of claim 1,wherein the stress reduction material has fillet portions, and thefillet portions are exposed after thinning the molding material.
 7. Themethod of claim 1, wherein the stress reduction material has filletportions, and the fillet portions remain covered after thinning themolding material.
 8. The method of claim 1, wherein the substrate is aninterposer.
 9. The method of claim 1, wherein the substrate is a thirdintegrated circuit die.
 10. A device comprising: a package device; afirst integrated circuit die bonded to the package device withdielectric-to-dielectric bonds and with metal-to-metal bonds; a secondintegrated circuit die bonded to the package device withdielectric-to-dielectric bonds and with metal-to-metal bonds; a bufferlayer around the first integrated circuit die and the second integratedcircuit die, the buffer layer comprising a stress reduction materialhaving a first Young's modulus; and an encapsulant around the bufferlayer, the first integrated circuit die, and the second integratedcircuit die, the encapsulant comprising a molding material having asecond Young's modulus, the first Young's modulus different than thesecond Young's modulus.
 11. The device of claim 10, wherein the stressreduction material has a first coefficient of thermal expansion and themolding material has a second coefficient of thermal expansion, thefirst coefficient of thermal expansion different than the secondcoefficient of thermal expansion.
 12. The device of claim 10, whereinthe stress reduction material comprises first fillers with a firstfiller load and the molding material comprises second fillers with asecond filler load, the first filler load different than the secondfiller load.
 13. The device of claim 10, wherein the stress reductionmaterial comprises first fillers with a first average filler particlesize and the molding material comprises second fillers with a secondaverage filler particle size, the first average filler particle sizedifferent than the second average filler particle size.
 14. The deviceof claim 10, wherein the stress reduction material has a firstelongation and the molding material has a second elongation, the firstelongation different than the second elongation.
 15. The device of claim10, wherein the package device is an interposer.
 16. The device of claim10, wherein the package device is a third integrated circuit die.
 17. Adevice comprising: a first integrated circuit die; a second integratedcircuit die bonded to the first integrated circuit die withdielectric-to-dielectric bonds and with metal-to-metal bonds; a thirdintegrated circuit die bonded to the first integrated circuit die withdielectric-to-dielectric bonds and with metal-to-metal bonds; a bufferlayer having a gap portion and fillet portions, the gap portion disposedbetween the second integrated circuit die and the third integratedcircuit die, the fillet portions disposed along outer edges of thesecond integrated circuit die and the third integrated circuit die; andan encapsulant around the buffer layer, the second integrated circuitdie, and the third integrated circuit die, the encapsulant having adifferent Young's modulus, a different coefficient of thermal expansion,a different filler load, a different average filler particle size, and adifferent elongation than the buffer layer.
 18. The device of claim 17,wherein the gap portion has a concave top surface and the filletportions have concave top surfaces.
 19. The device of claim 17, whereinthe gap portion has a straight top surface and the fillet portions haveconcave top surfaces.
 20. The device of claim 17, wherein the bufferlayer has a lower Young's modulus, a greater coefficient of thermalexpansion, a smaller filler load, a smaller average filler particlesize, and a greater elongation than the encapsulant.